# System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime

_Computer Modeling in Engineering & Sciences · Cheng-Ta Yeh, Yu-Zhong Kang, Louis Cheng-Lu Yeng et al. · 2026_

Canonical: https://diginpl.com/books/paper-cmes-2026-085541
Last updated: 2026-11-10

## Quick facts

- **Author:** Cheng-Ta Yeh; Yu-Zhong Kang; Louis Cheng-Lu Yeng; Yi-Kuei Lin ([Crossref](https://doi.org/10.32604/cmes.2026.085541))
- **Published:** 2026 ([Crossref](https://doi.org/10.32604/cmes.2026.085541))
- **Publisher:** Tech Science Press ([Crossref](https://doi.org/10.32604/cmes.2026.085541))
- **Journal:** Computer Modeling in Engineering & Sciences ([Crossref](https://doi.org/10.32604/cmes.2026.085541))
- **DOI:** 10.32604/cmes.2026.085541 ([Crossref](https://doi.org/10.32604/cmes.2026.085541))

## Questions

**Who wrote System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime?**  
System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime was written by Cheng-Ta Yeh, Yu-Zhong Kang, Louis Cheng-Lu Yeng, Yi-Kuei Lin.

**When was System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime first published?**  
System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime was first published in 2026.

## Sources

- [Publisher record (DOI, via Crossref)](https://doi.org/10.32604/cmes.2026.085541)

## Licence and attribution

Open-access publication. Read it free at the publisher: https://doi.org/10.32604/cmes.2026.085541.

## Cite this page

"System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime". DigiNepal. Last updated 10 November 2026. https://diginpl.com/books/paper-cmes-2026-085541. Retrieved 14 November 2026.