{"id":"paper-cmes-2026-085541","type":"book","url":"https://diginpl.com/books/paper-cmes-2026-085541","language":"en","name":"System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime","name_en":"System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime","name_ne":null,"description":"Computer Modeling in Engineering & Sciences · Cheng-Ta Yeh, Yu-Zhong Kang, Louis Cheng-Lu Yeng et al. · 2026","headline":"Computer Modeling in Engineering & Sciences · Cheng-Ta Yeh, Yu-Zhong Kang, Louis Cheng-Lu Yeng et al. · 2026","also_known_as":[],"summary":"","summary_more":[],"facts":[{"key":"authors","label":"Author","values":[{"text":"Cheng-Ta Yeh"},{"text":"Yu-Zhong Kang"},{"text":"Louis Cheng-Lu Yeng"},{"text":"Yi-Kuei Lin"}],"source":{"label":"Crossref","url":"https://doi.org/10.32604/cmes.2026.085541"}},{"key":"published","label":"Published","values":[{"text":"2026","date":"2026"}],"source":{"label":"Crossref","url":"https://doi.org/10.32604/cmes.2026.085541"}},{"key":"publisher","label":"Publisher","values":[{"text":"Tech Science Press"}],"source":{"label":"Crossref","url":"https://doi.org/10.32604/cmes.2026.085541"}},{"key":"journal","label":"Journal","values":[{"text":"Computer Modeling in Engineering & Sciences"}],"source":{"label":"Crossref","url":"https://doi.org/10.32604/cmes.2026.085541"}},{"key":"doi","label":"DOI","values":[{"text":"10.32604/cmes.2026.085541","url":"https://doi.org/10.32604/cmes.2026.085541"}],"source":{"label":"Crossref","url":"https://doi.org/10.32604/cmes.2026.085541"}}],"office":null,"sections":[],"cited":[],"cited_from":null,"videos":[],"last_reviewed":null,"organizations":[],"same_as":["https://doi.org/10.32604/cmes.2026.085541"],"faq":[{"q":"Who wrote System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime?","a":"System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime was written by Cheng-Ta Yeh, Yu-Zhong Kang, Louis Cheng-Lu Yeng, Yi-Kuei Lin."},{"q":"When was System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime first published?","a":"System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime was first published in 2026."}],"related":[],"places_in":[],"nearby":[],"image":null,"sources":[{"label":"Publisher record (DOI, via Crossref)","url":"https://doi.org/10.32604/cmes.2026.085541","license":null}],"license":null,"attribution":"Open-access publication. Read it free at the publisher: https://doi.org/10.32604/cmes.2026.085541.","cite":"\"System Reliability Evaluation for Semiconductor Manufacturing Systems Considering Workload and Unscheduled Downtime\". DigiNepal. Last updated 10 November 2026. https://diginpl.com/books/paper-cmes-2026-085541. Retrieved 14 November 2026.","date_modified":"2026-11-10T06:52:07Z","facts_checked":"2026-11-10","alternates":{"html":"https://diginpl.com/books/paper-cmes-2026-085541","en":"https://diginpl.com/books/paper-cmes-2026-085541","ne":null}}